Product model：MX12R Series
Createdate：2019-7-25 17:24:49
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Introduction TO MX12R Semiconductor FPD Inspection Microscope
Equipped with varisized wafer holders(including 4/6/8/12 inches), MX12R is professionally applied for wafer and flatpanel display detection, maximally supports for dia. 300mm of wafer and 17inches of FPD. More comfortable, flexible and quicker operation is availablewith upgraded ergonomics design.
●Tilting viewing head
0~35 degreetilting viewing head for adjusting the height of eye point, provides the bestviewing angle to different users, relieving the fatigue from long-timeoperation and significantly improving the work efficiency.
●Convenient and stable stage
Stage Clutch driven system, button up for quick movement and press down tocancel, is available to allay fatigue from long-time operation. Stage withlinear guide rail, is realizable to be lightly and smoothly moved.
●Safe and highspeed electric nosepiece
With forward andbackward two buttons for switch, is quick to convert magnification and accurateto repeat orientation.Mechanical switch mode, effectively prolongs the servicelife of nosepiece.
●Front operatingbuttons
MX12R adopts electriccontrol for nosepiece and aperture diaphragm, with control buttons in front, iseasy and convenient for operation, improve the working efficiency.
●Shockproofframe
With six levelingfeet, MX12R metal frame is low-centered and highsteady, anti-knock to ensureimage stabilization.
●realizesan automatic future
Supporting for brightfield, dark field, polarizing and DIC, MX12R is widely applied for inspectionsof semiconductor, FPD, circuit package, PCB, materials, casting metal ceramicpart, abrasive tools and so on.
Technical Specifications
Optical System | Infinity color corrected optical system |
Observation | Bright filed / Dark field / Polarizing / DIC |
Viewing Head | Tilting trinocular head (Erect image), 0-35 degree adjustable, interpupillary distance: 50-76mm, splitting ratio: 100:0 or 0:100 Eyepiece |
Eyepiece | High eye point wide field plan eyepiece PL10X/25mm, with adjustable diopter; reticle attachable |
Objective | BD semi-APO DIC objective 5X/10X/20X/50X/100X |
Long working distance BD semi-APO DIC objective 20X | |
Long working distance BD semi-APO objective 50X/100X | |
Nosepiece | Electronic BD sextuple nosepiece with DIC slot |
Frame | Reflected frame with low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. With upper limit and tension adjustment. Built-in 100-240V wide voltage system |
Transmitted & Reflected frame with low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. With upper limit and tension adjustment. Built-in 100-240V wide voltage system | |
Stage | 14 X 12 inches three-layer mechanical stage with low position coaxial adjustment, size: 718mm X 420mm, moving range:356mm X 305mm; with clutch handle for quick movement; glass plate for reflected use. |
495mm X 641mm electronic stage, moving range: 306mm X 306mm; (3+L/50) μm repeated positioning accuracy | |
Illumination | BD reflected illuminator, with electronic variable aperture and field diaphragm, center adjustable; with switch for changing bright and dark field; with slots for filters and polarizing kit |
Camera Adapter | 0.5X / 0.65X 1X C-mount adapte |
Others | Polarizing kit; interference filters; high precision micrometer; DIC attachment |
